Search for dissertations about: "ALD"

Showing result 1 - 5 of 42 swedish dissertations containing the word ALD.

  1. 1. CVD and ALD in the Bi-Ti-O system

    University dissertation from Uppsala : Acta Universitatis Upsaliensis

    Author : Mikael Schuisky; Uppsala universitet.; [2000]
    Keywords : NATURVETENSKAP; NATURAL SCIENCES; Chemistry; Halide-CVD; ALD; Bismuth titanate; Bi4Ti3O12; Titanium oxide; TiO2; Bismuthoxide; Bi2O2.33; Epitaxy; QCM.; Kemi; NATURAL SCIENCES Chemistry; NATURVETENSKAP Kemi; Inorganic Chemistry; oorganisk kemi;

    Abstract : Bismuth titanate Bi4Ti3O12, is one of the bismuth based layered ferroelectric materials that is a candidate for replacing the lead based ferroelectric materials in for instance non-volatile ferroelectric random access memories (FRAM). This is due to the fact that the bismuth based ferroelectrics consists of pseudo perovskite units sandwiched in between bismuth oxide layers, which gives them a better fatigue nature. READ MORE

  2. 2. CVD and ALD of Group IV- and V-Oxides for Dielectric Applications

    University dissertation from Uppsala : Acta Universitatis Upsaliensis

    Author : Katarina Forsgren; Uppsala universitet.; [2001]
    Keywords : NATURVETENSKAP; NATURAL SCIENCES; Chemistry; CVD; ALD; Dielectric constant; Tantalum oxide; Ta2O5; Zirconium oxide; ZrO2; Hafnium oxide; HfO2; QCM; Kemi; NATURAL SCIENCES Chemistry; NATURVETENSKAP Kemi; Inorganic Chemistry; oorganisk kemi;

    Abstract : Due to the constantly decreasing dimensions of electronic devices, the conventional dielectric material in transistors and capacitors, SiO2, has to be replaced by a material with higher dielectric constant. Some of the most promising candidates are tantalum oxide,Ta2O5, zirconium oxide, ZrO2 and hafnium oxide, HfO2. READ MORE

  3. 3. Employing Metal Iodides and Oxygen in ALD and CVD of Functional Metal Oxides

    University dissertation from Uppsala : Acta Universitatis Upsaliensis

    Author : Jonas Sundqvist; Uppsala universitet.; [2003]
    Keywords : NATURVETENSKAP; NATURAL SCIENCES; Inorganic chemistry; CVD; ALD; tantalum oxide; hafnium oxide; tin oxide; epitaxy; Ta2O5; HfO2; SnO2; XRD; Oorganisk kemi; NATURAL SCIENCES Chemistry Inorganic chemistry; NATURVETENSKAP Kemi Oorganisk kemi; Inorganic Chemistry; Oorganisk kemi;

    Abstract : Many materials exhibit interesting and novel properties when prepared as thin films. Thin film metal oxides have had an impact on the technological progress of the microelectronics mainly due to their electrical and optical properties. READ MORE

  4. 4. ALD Buffer Layer Growth and Interface Formation on Cu(In,Ga)Se2 Solar Cell Absorbers

    University dissertation from Uppsala : Acta Universitatis Upsaliensis

    Author : Jan Sterner; Uppsala universitet.; [2004]
    Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Electronics; thin film; Cu In; Ga Se2; CIGS; chalcopyrite; ALD; sulfurization; buffer layer; XPS; UPS; electron spectroscopy; band alignment; atomic layer deposition; Elektronik; TECHNOLOGY Electrical engineering; electronics and photonics Electronics; TEKNIKVETENSKAP Elektroteknik; elektronik och fotonik Elektronik;

    Abstract : Cu(In,Ga)Se2 (CIGS) thin film solar cells contain a thin layer of CdS. To avoid toxic heavy-metal-containing waste in the module production the development of a cadmium-free buffer layer is desirable. This thesis considers alternative Cd-free buffer materials deposited by Atomic Layer Deposition (ALD). READ MORE

  5. 5. Thin Film Synthesis of Nickel Containing Compounds

    University dissertation from Uppsala : Acta Universitatis Upsaliensis

    Author : Erik Lindahl; Uppsala universitet.; [2009]
    Keywords : NATURVETENSKAP; NATURAL SCIENCES; Chemical Vapor Deposition; CVD; Atomic Layer Deposition; ALD; Nickel nitride; Nickel oxide; Nickel; Epitaxy; multilayer; Thin film; NATURAL SCIENCES Chemistry Inorganic chemistry; NATURVETENSKAP Kemi Oorganisk kemi; Inorganic Chemistry; Oorganisk kemi;

    Abstract : Most electrical, magnetic or optical devices are today based on several, usually extremely thin layers of different materials.  In this thesis chemical synthesis processes have been developed for growth of less stable and metastable layers, and even multilayers, of nickel containing compounds. READ MORE