Search for dissertations about: "Fredrik Engelmark"

Found 1 swedish dissertation containing the words Fredrik Engelmark.

2. 1. AlN and High-k Thin Films for IC and Electroacoustic Applications

   Author : Fredrik Engelmark; Ivan Petrov; Uppsala universitet; []
   Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Electronics; Elektronik; Electronics; Elektronik; Elektronik; Electronics;

   Abstract : Further, a highly selective dry etch process for etching Al on AlN has been developed for the fabrication of MIM, MIS, SAW and BAW test structures for electrical and electroacoustic characterization of the films. A dielectric constant of 10 for AlN and 25 for Ti doped Ta2O5 have been measured. READ MORE