Search for dissertations about: "Gang Luo"

Found 1 swedish dissertation containing the words Gang Luo.

  1. 1. Nanoimprint Lithography Based Nanoelectromechanical Device Fabrication

    Author : Gang Luo; Fasta tillståndets fysik; []
    Keywords : NATURVETENSKAP; NATURAL SCIENCES;

    Abstract : This thesis presents studies concerning the development of nanoimprint lithography technology, nanoimprint lithography-based nanofabrication, as well as the production of NEMS devices and their characterization. It can be divided into the following parts: The first part introduces different NIL stamp fabricating methods and processes. READ MORE