Search for dissertations about: "Gustaf Sjöblom"

Found 2 swedish dissertations containing the words Gustaf Sjöblom.

2. 1. Metal Gate Technology for Advanced CMOS Devices

   Author : Gustaf Sjöblom; Jörgen Olsson; Stefan de Gendt; Uppsala universitet; []
   Keywords : Electronics; metal gate; high-k dielectrics; titanium nitride; zirconium nitride; MOSFET; thin film; work function; XPS; Elektronik;

   Abstract : The development and implementation of a metal gate technology (alloy, compound, or silicide) into metal-oxide-semiconductor field effect transistors (MOSFETs) is necessary to extend the life of planar CMOS devices and enable further downscaling. This thesis examines possible metal gate materials for improving the performance of the gate stack and discusses process integration as well as improved electrical and physical measurement methodologies, tested on capacitor structures and transistors. READ MORE

4. 2. Sputtering and Characterization of Complex Multi-element Coatings

   Author : Erik Särhammar; Tomas Nyberg; Ulf Jansson; Urban Wiklund; Gustaf Sjöblom; Uppsala universitet; []
   Keywords : NATURVETENSKAP; NATURAL SCIENCES; thin film; coating; magnetron sputtering; modelling; tribofilm; tungsten disulphide;

   Abstract : The thin film technology is of great importance in modern society and is a key technology in wide spread applications from electronics and solar cells to hard protective coatings on cutting tools and diffusion barriers in food packaging. This thesis deals with various aspects of thin film processing and the aim of the work is twofold; firstly, to obtain a fundamental understanding of the sputter deposition and the reactive sputter deposition processes, and secondly, to evaluate sputter deposition of specific material systems with low friction properties and to improve their performance. READ MORE