Search for dissertations about: "III-V micromechanics"

Found 2 swedish dissertations containing the words III-V micromechanics.

  2. 1. Surface-Micromachined Vertical-Cavity Micro-Opto-Electro-Mechanical Devices on InP

    Author : Nicolae Chitica; KTH; []
    Keywords : MOEMS; Optical MEMS; InP; GaInAsP; VCSEL; MOVPE; surface micromachining; tunable devices; vertical cavity devices; air-gap reflectors; III-V micromechanics;

    Abstract : .... READ MORE

  4. 2. Wafer Bonding - Problems and Possibilities

    Author : Mats Bergh; Chalmers tekniska högskola; []
    Keywords : NATURVETENSKAP; NATURAL SCIENCES; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; SOI; atomic force microscope; micromechanics; compliant substrates; wafer bonding; semi-insulating silicon; AFM; surface chemistry; diamond; silicon on insulator; aluminium nitride; microelectronics; surface roughness;

    Abstract : The wafer bonding technology offers a unique opportunity to combine different materials. This has been used for the realisation of novel silicon on insulator (SOI) structures. By replacing the buried silicon dioxide layer with a polycrystalline diamond film the thermal properties of the SOI structure are improved. READ MORE