Search for dissertations about: "MEMS sensors"

Showing result 1 - 5 of 23 swedish dissertations containing the words MEMS sensors.

2. 1. MEMS-based electrochemical gas sensors and wafer-level methods

   Author : Hithesh K Gatty; Göran Stemme; Roxhed Niclas; Anita Lloyd Spetz; KTH; []
   Keywords : MEMS; gas sensors; electrochemical; nitric oxide; hydrogen sulphide; nafion; nano;

   Abstract : This thesis describes novel microel ectromechanical system (MEMS) based electrochemical gas sensors and methods of fabrication.This thesis presents the research in two parts. In the first part, a method to handle a thin silicon wafer using an electrochemically active adhesive is described. READ MORE

4. 2. Integrated microsystems for continuous glucose monitoring, interstitial fluid sampling and digital microfluidics

   Author : Federico Ribet; Niclas Roxhed; Göran Stemme; Boris Stoeber; KTH; []
   Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Microelectromechanical systems MEMS ; biosensors; biomedical devices; continuous glucose monitoring CGM ; glucose sensors; microneedles; interstitial fluid sampling; minimally-invasive technologies; electrochemical sensors; heterogeneous integration; wire bonding; magnetic assembly; electrowetting-on-dielectric EWOD ; digital microfluidics; ionic liquids; gas sensors; optical switches; laser shutters.; Electrical Engineering; Elektro- och systemteknik;

   Abstract : Interdisciplinary research between medicine and microsystem engineering creates new possibilities to improve the quality of life of patients or to further enhance the performance of already existing devices. In particular, microsystems show great potential for the realization of biosensors and sampling devices to monitor bioanalytes with minimal patient discomfort. READ MORE

5. 3. Micromachined Three-Axis Accelerometers and Sensor Readout Electronics

   Author : Henrik Rödjegård; Chalmers tekniska högskola; []
   Keywords : NATURVETENSKAP; NATURAL SCIENCES; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; three axis accelerometer; sensor readout; inertial sensors; gyroscope; MEMS; digital feedback; capacitive readout;

   Abstract : Miniaturized, MEMS-based, inertial navigation systems are used to track the position of moving objects without an external reference system. Several existing and future applications such as indoor navigation, stability control of vehicles, active prostheses or training aids for sportsmen would benefit from the small size and the low cost of micromachined inertial sensors. READ MORE

6. 4. GPS/IMU Integrated System for Land Vehicle Navigation based on MEMS

   Author : Yueming Zhao; Lars Sjöberg; Milan Horemuž; Krzysztof Gajdamowicz; KTH; []
   Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; GPS; IMU; MEMS; integration; Kalman filter; physical constraint; outlier;

   Abstract : The Global Positioning System (GPS) and an Inertial Navigation System (INS)are two basic navigation systems. Due to their complementary characters in manyaspects, a GPS/INS integrated navigation system has been a hot research topic inthe recent decade. Both advantages and disadvantages of each individual systemare analyzed. READ MORE

7. 5. Advanced MEMS Pressure Sensors Operating in Fluids

   Author : Emil Anderås; Ventsislav Yantchev; Ilia Katardjiev; Jörgen Olsson; Enrico Verona; Uppsala universitet; []
   Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; pressure sensor; piezoresistance; nanofilms; AlN; microacoustic; Lamb wave; thin film; resonator; sensitivity; Teknisk fysik med inriktning mot elektronik; Engineering Science with specialization in Electronics;

   Abstract : Today’s MEMS technology allows manufacturing of miniaturized, low power sensors that sometimes exceeds the performance of conventional sensors. The pressure sensor market today is dominated by MEMS pressure sensors.In this thesis two different pressure sensor techniques are studied. READ MORE