Search for dissertations about: "Olivier Douheret"

Found 1 swedish dissertation containing the words Olivier Douheret.

2. 1. High resolution electrical characterization of III-V materials and devices

   Author : Olivier Douheret; Srinivasan Anand; Wilfried Vandervorst; KTH; []
   Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Electrical engineering; condensed matter; electrics; electrical; materials science; Elektroteknik; elektronik och fotonik; Electrical engineering; electronics and photonics; Elektroteknik; elektronik och fotonik;

   Abstract : The continuing shrinkage of semiconductor devices towards nanoscale features and increased functionality has prompted a strong need for high-resolution characterization tools capable of mapping the electrical properties with nanoscale lateral resolution. In this regard, scanning capacitance microscopy (SCM) scanning spreading resistance microscopy (SSRM) and Kelvin probe force microscopy (KPFM) have emerged as powerful techniques. READ MORE