Search for dissertations about: "RPECVD"
Found 2 swedish dissertations containing the word RPECVD.
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1. Ultrathin Oxides in Metal-Oxide-Silicon Structures: Defects and Characterization
Abstract : The properties of metal-oxide-silicon (MOS) structures with ultrathin oxide layers (15-30 Å) have been investigated by means of electrical characterization. The characterization methods used were mainly capacitance voltage (C-V), current voltage (I-V) and constant voltage stress (I-t) measurements. READ MORE
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2. Deposition of high quality thin dielectrics on silicon
Abstract : .... READ MORE
Result pages:
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