Search for dissertations about: "SSRM"

Found 3 swedish dissertations containing the word SSRM.

2. 1. Scanning capacitance microscopy for semiconductor characterisation

   Author : Olle Bowallius; KTH; []
   Keywords : SCM; SSRM; InP; Si; Buried heterostructure laser; Doping; Regrowth; Capacitance; P-n junction;

   Abstract : .... READ MORE

4. 2. High resolution electrical characterization of III-V materials and devices

   Author : Olivier Douheret; Srinivasan Anand; Wilfried Vandervorst; KTH; []
   Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Electrical engineering; condensed matter; electrics; electrical; materials science; Elektroteknik; elektronik och fotonik; Electrical engineering; electronics and photonics; Elektroteknik; elektronik och fotonik;

   Abstract : The continuing shrinkage of semiconductor devices towards nanoscale features and increased functionality has prompted a strong need for high-resolution characterization tools capable of mapping the electrical properties with nanoscale lateral resolution. In this regard, scanning capacitance microscopy (SCM) scanning spreading resistance microscopy (SSRM) and Kelvin probe force microscopy (KPFM) have emerged as powerful techniques. READ MORE

5. 3. Characterization of electrical properties in 4H-SiC by imaging techniques

   Author : John Österman; Anders Hallén; Vito Raineri; KTH; []
   Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Electrical engineering; Elektroteknik; elektronik och fotonik; Electrical engineering; electronics and photonics; Elektroteknik; elektronik och fotonik;

   Abstract : 4H-SiC has physical properties supremely suited for a variety of high power, high frequency and high temperature electronic device applications. To fully take advantage of the material's potential, several problems remain to be solved. READ MORE