Search for dissertations about: "Ultra precision 2D metrology"

Found 2 swedish dissertations containing the words Ultra precision 2D metrology.

  2. 1. Ultra precision metrology : the key for mask lithography and manufacturing of high definition displays

    Author : Peter Ekberg; Lars Mattsson; Torgny Carlsson; KTH; []
    Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Ultra precision metrology; LCD-display; OLED-display; nm-resolution; large area; random phase measurement; acousto-optic deflection; scanning; 2D measurement; mask; CCD; CMOS; image processing; edge detection; TECHNOLOGY; TEKNIKVETENSKAP; Manufacturing engineering; Produktionsteknik;

    Abstract : Metrology is the science of measurement. It is also a prerequisite for maintaining a high quality in all manufacturing processes. In this thesis we will present the demands and solutions for ultra-precision metrology in the manufacturing of lithography masks for the TV-display industry. READ MORE

  4. 2. Development of ultra-precision tools for metrology and lithography of large area photomasks and high definition displays

    Author : Lars Peter Ekberg; Lars Mattsson; Lars Stiblert; Richard Leach; KTH; []
    Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Ultra precision 2D metrology; LCD-display; OLED-display; nm-resolution; random phase measurement; large area; photomask; acousto-optic deflection; self-calibration; Z-correction; absolute accuracy; uncertainty.; SRA - Production; SRA - Produktion;

    Abstract : Large area flat displays are nowadays considered being a commodity. After the era of bulky CRT TV technology, LCD and OLED have taken over as the most prevalent technologies for high quality image display devices. READ MORE