Search for dissertations about: "contact lithography"
Showing result 1 - 5 of 23 swedish dissertations containing the words contact lithography.
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1. Fabrication of Low-Dimensional Structures in III-V Semiconductors
Abstract : The thesis presents studies on the processing technology and the characterization of nanometer-sized and low-dimensional structures in III-V semiconductors. Two major approaches are described: 1) the combination of aerosol technology and plasma etching for the fabrication of quantum dots (QDs) in InP-based materials and 2) the use of high-resolution electron beam lithography and plasma or wet chemical etching to make quantum well wires (QWWs) in both GaAs and InP-based structures. READ MORE
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2. Controlled axonal outgrowth and cell reactions to nanostructures
Abstract : The interface between living cells and artificial surfaces are highly relevant for biomedical applications such as implants and organized cell growth for tissue reconstruction as well as for basic science purposes. In the present thesis, we have studied axonal guidance on various nano-patterned surfaces such as polymethyl-meth-acrylate, porous silicon and on magnetically aligned Ni nanowires. READ MORE
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3. Development of Nanoimprint Lithography for Applications in Electronics, Photonics and Life-sciences
Abstract : This thesis describes different aspects of nanotechnology manufacturing with nanoimprint lithography (NIL), a relatively new nanofabrication tool capable of high resolution and high throughput. Surface structure creation with NIL is based on mechanical deformation of the patterning material. READ MORE
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4. Silicon nanowire based devices for More than Moore Applications
Abstract : Silicon nanowires (SiNW) are in the spotlight for a few years in the research community as a good candidate for biosensing applications. This is attributed to their small dimensions in nanometer scale that offers high sensitivity, label-free detection and at the same time utilizing small amount of sample. READ MORE
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5. Fabrication, characterization, and modeling of metallic source/drain MOSFETs
Abstract : As scaling of CMOS technology continues, the control of parasitic source/drain (S/D) resistance (RSD) is becoming increasingly challenging. In order to control RSD, metallic source/drain MOSFETs have attracted significant attention, due to their low resistivity, abrupt junction and low temperature processing (≤700 °C). READ MORE