Search for dissertations about: "dc magnetron sputtering"

Showing result 1 - 5 of 50 swedish dissertations containing the words dc magnetron sputtering.

  2. 1. Spectrally Selective Solar Absorbing Coatings Prepared by dc Magnetron Sputtering

    Author : Shuxi Zhao; Ewa Wäckelgård; Carl-Gustaf Ribbing; Volker Wittwer; Uppsala universitet; []
    Keywords : Materials science; spectrally selective surface; solar energy; magnetron sputtering; thin film; Materialvetenskap;

    Abstract : Spectrally selective solar absorber using composite Ni-NiO as coating materials was studied. Samples were prepared by dc magnetron sputtering unit named Rulle, which is a miniature copy of an industrial roll-coater unit. READ MORE

  4. 2. Fundamentals of High Power Impulse Magnetron Sputtering

    Author : Johan Böhlmark; Ulf Helmersson; André Anders; Linköpings universitet; []
    Keywords : NATURVETENSKAP; NATURAL SCIENCES; Plasma; Pulsed plasma; High Power Pulsed Magnetron Sputtering; Plasma Characterization; Physics; Fysik;

    Abstract : In plasma assisted thin film growth, control over the energy and direction of the incoming species is desired. If the growth species are ionized this can be achieved by the use of a substrate bias or a magnetic field. Ions may be accelerated by an applied potential, whereas neutral particles may not. READ MORE

  5. 3. Toward Energy-efficient Physical Vapor Deposition : Routes for Replacing Substrate Heating during Magnetron Sputtering by Employing Metal Ion Irradiation

    Author : Xiao Li; Grzegorz Greczynski; Ivan Petrov; Lars Hultman; Jyh-Wei Lee; Linköpings universitet; []
    Keywords : NATURVETENSKAP; NATURAL SCIENCES; PVD; Magnetron sputtering; Thin films; HiPIMS; TiAlN; Energy efficiency;

    Abstract : In this Thesis, magnetron sputtering is perfected as an environmental-friendly deposition technique. I performed systematic studies of a novel approach - hybrid high-power impulse and dc magnetron co-sputtering (HiPIMS/DCMS) with metal-ion-synchronized substrate bias pulses. READ MORE

  6. 4. Plasma Characterization & Thin Film Growth and Analysis in Highly Ionized Magnetron Sputtering

    Author : Jones Alami; Ulf Helmersson; James Bradley; Linköpings universitet; []
    Keywords : Highly ionized pulsed magnetron sputtering; HPPMS; HPPIMS; thin film; plasma analysis; Langmuir probe; TECHNOLOGY; TEKNIKVETENSKAP;

    Abstract : The present thesis addresses two research areas related to film growth in a highly ionized magnetron sputtering system: plasma characterization, and thin film growth and analysis. The deposition technique used is called high power pulsed magnetron sputtering (HPPMS). READ MORE

  7. 5. Magnetron Sputter Epitaxy of GaN

    Author : Muhammad Junaid; Jens Birch; Lars Hultman; Vanya Darakchieva; Linköpings universitet; []
    Keywords : NATURAL SCIENCES; NATURVETENSKAP;

    Abstract : Electronic-grade GaN (0001) epilayers have been grown directly on Al2O3 (0001) substrates by reactive DC-magnetron sputter epitaxy (MSE) from a liquid Ga sputtering target in an Ar/N2 atmosphere. The as-grown GaN epitaxial film exhibit low threading dislocation density on the order of ≤ 1010 cm-2 obtained by transmission electron microscopy and modified Williamson-Hall plot. READ MORE