Search for dissertations about: "electrostatic actuator"
Found 4 swedish dissertations containing the words electrostatic actuator.
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1. Wafer-level heterogeneous integration of MEMS actuators
Abstract : This thesis presents methods for the wafer-level integration of shape memory alloy (SMA) and electrostatic actuators to functionalize MEMS devices. The integration methods are based on heterogeneous integration, which is the integration of different materials and technologies. READ MORE
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2. Novel RF MEMS Switch and Packaging Concepts
Abstract : Radio-frequency microelectromechanical systems (RF~MEMS) are highly miniaturized devices intended to switch, modulate, filter or tune electrical signals from DC to microwave frequencies. The micromachining techniques used to fabricate these components are based on the standard clean-room manufacturing processes for high-volume integrated semiconductor circuits. READ MORE
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3. Microstructure technology in silicon, quartz, and diamond
Abstract : Microstructure technology can be defined as a set of fabrication processes enabling three-dimensional structures featuring dimensions in the micrometer to millimetre range, with micrometer accuracy. Microstructures can be assembled or manufactured integrated with other structures and/or microelectronics forming complex microsystems. READ MORE
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4. Novel RF MEMS Devices for W-Band Beam-Steering Front-Ends
Abstract : This thesis presents novel millimeter-wave microelectromechanical-systems (MEMS) components for W-band reconfigurable beam-steering front-ends. The proposed MEMS components are novel monocrystalline-silicon dielectric-block phase shifters, and substrate-integrated three-dimensional (3D) micromachined helical antennas designed for the nominal frequency of 75 GHz. READ MORE