Search for dissertations about: "ion beam lithography"

Showing result 1 - 5 of 32 swedish dissertations containing the words ion beam lithography.

  2. 1. Direct writing with an MeV proton beam: Development and Applications

    Author : Vaida Auzelyte; Kärnfysik; []
    Keywords : NATURVETENSKAP; NATURAL SCIENCES; direct writing; beam control; Physics; Fysik; Teknik; Technological sciences; proton beam; lithography; Fysicumarkivet A:2006:Auželytė;

    Abstract : This thesis presents work aimed at the development and application of a new lithography system for direct material patterning with the MeV proton beam at the Lund Nuclear Microprobe (NMP) facility. MeV proton beams are advantageous for use as a patterning tool due to their deep and well defined penetration through matter and their highly local energy deposition. READ MORE

  4. 2. Low and High Energy Ion Beams in Nanotechnology

    Author : Thomas Winzell; Kärnfysik; []
    Keywords : NATURVETENSKAP; NATURAL SCIENCES; ion implantation; magnetic materials; ERDA; nanometer structures; Nuclear physics; MeV Ions; lithography; Kärnfysik; Fysicumarkivet A:2000:Winzell;

    Abstract : In this thesis, two ways of fabrication of nanometer-sized semiconductor features are presented. Low Energy Ion Implantation (LEII) has been used to create shallow (sub-50 nm) and laterally small (5 m m – 200 nm) features by 10 keV As+ doping of B background doped Si. READ MORE

  5. 3. Bioelectronic Nanosensor Devices for Environmental and Biomedical Analysis

    Author : Klas Risveden; Tillämpad biokemi; []
    Keywords : NATURVETENSKAP; NATURAL SCIENCES; Regional Ion Sensitive Field Effect Transistor; Region Ion Sensitive Field Effect Transistor; RISFET; Conducting channel; Bioelectronic Nanosensor; Bioelectronic; Biosensor; Nanosensor; Chemical Sensor; Sensor; Semiconductor sensor; Single molecule trapping; Scaling; Protein trapping; Nanoelectronics; Lab-on-a-chip; pico-ammeter; Nanobiosensor; Sample Applicator; Sequential Batch Analysis; Sequential Batch Analysis System; SBAS; Nanowire; Branched nanowire structure; Nanotree; Nanorod; Nano processing; Micro processing; Electron Beam Lithography; EBL; UV-lithography; Molecular Imprinting; DUV-lithography; Moleculary Imprinted Polymers; MIP; Biomimetics; QCM; Biomimetic sensor; Quartz Crystal Microbalance; QCM-D; Nanoparticles; Acetylcholine esterase; Glucose oxidase; Glucose; Gluconolactone; Propranolol; Gluconate; Carbofuran; Neurotoxic; Environmental analysis; Biomedical Analysis; Biotechnology; Medicine; Pesticide; Food Technology; Analyis; Flow Injection Analysis; FIA; Scanning Probe Microscopy; Scanning Kelvin Probe Microscopy; SPM; KPM; AFM; SKM; KPFM; SKPM; Nanostructures.; Atomic Force Microscopy; KFM;

    Abstract : A new type of Bioelectronic Nanosensor Device with potential applications in medicine,biotechnology and environmental analysis was designed. The nanosensor is based on RISFET (Regional Ion Sensitive Field Effect Transistor) technology. READ MORE

  6. 4. Fabrication and Applications of a Focused Ion Beam Based Nanocontact Platform for Electrical Characterization of Molecules and Particles

    Author : Tobias Blom; Klaus Leifer; Maria Strömme; Michel Calame; Uppsala universitet; []
    Keywords : Focused Ion Beam; FIB; Scanning Electron Microscopy; SEM; Nanogap electrodes; Nanostructuring; Nanofabrication; Electron Beam Lithography; Electrical characterization; Dielectrophoresis;

    Abstract : The development of new materials with novel properties plays an important role in improving our lives and welfare. Research in Nanotechnology can provide e.g. cheaper and smarter materials in applications such as energy storage and sensors. READ MORE

  7. 5. Ion Tracks for Micro- and Nanofabrication : From Single Channels to Superhydrophobic Surfaces

    Author : Reimar Spohr; Lars Westerberg; Lars Montelius; Uppsala universitet; []
    Keywords : NATURVETENSKAP; NATURAL SCIENCES; Ion track; single ion; real time; phase detection; conductometric cell; conductometry; electro replication; microtechnology; nanotechnology; surfactant; self organization; GMR; magnetic; sensor technology; hydrophobic; tilted texture.; Physics; Fysik; Materialvetenskap; Materials Science;

    Abstract : A method is described for preset-count irradiations between 1 and 100 ions singling-out individual ions from an ion beam with more than a billion ions arriving per second. The ion tracks are etched in a conductometric system with real-time evaluation of the acquired data. The etch process can be interrupted when reaching a preset channel diameter. READ MORE