Search for dissertations about: "micromachining"
Showing result 1 - 5 of 50 swedish dissertations containing the word micromachining.
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1. Silicon micromachining : methodological aspects and applications in biomedical pressure sensors
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2. Micromachining by sacrificial aluminium etching
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3. Novel RF MEMS Devices Enabled by Three-Dimensional Micromachining
Abstract : This thesis presents novel radio frequency microelectromechanical (RF MEMS) circuits based on the three-dimensional (3-D) micromachined coplanar transmission lines whose geometry is re-configured by integrated microelectromechanical actuators. Two types of novel RF MEMS devices are proposed. READ MORE
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4. Polymer Microoptics in Silicon Micromachining
Abstract : MEMS (micro-electro-mechanical system) technology is an established field, which makes use of the advanced state of silicon processing to fabricate complex electro-mechanical structures and devices. Microoptics is a new, but advanced technology within the field of optics. READ MORE
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5. Exploiting the Terahertz Spectrum with Silicon Micromachining : Waveguide Components, Systems and Metrology
Abstract : The terahertz spectrum (300 GHz - 3 THz) represents the final frontier for modern electronic and optical systems, wherein few low-cost, volume-manufacturable solutions exist. THz frequencies are of great scientific and commercial interest, with applications as diverse as radio astronomy, sensing and imaging and wireless communications. READ MORE