Search for dissertations about: "plasma etching"

Showing result 1 - 5 of 39 swedish dissertations containing the words plasma etching.

  2. 1. Fabrication of Low-Dimensional Structures in III-V Semiconductors

    Author : Ivan Maximov; Fasta tillståndets fysik; []
    Keywords : NATURVETENSKAP; NATURAL SCIENCES; III-V semiconductors; plasma; etching; aerosol; lithography; quantum dots; quantum well wires; quantum point contact; damage; luminescence; Fysicumarkivet A:1997:Maximov; Halvledarfysik; Semiconductory physics;

    Abstract : The thesis presents studies on the processing technology and the characterization of nanometer-sized and low-dimensional structures in III-V semiconductors. Two major approaches are described: 1) the combination of aerosol technology and plasma etching for the fabrication of quantum dots (QDs) in InP-based materials and 2) the use of high-resolution electron beam lithography and plasma or wet chemical etching to make quantum well wires (QWWs) in both GaAs and InP-based structures. READ MORE

  4. 2. Plasma assisted technology for Si-based photonic integrated circuits

    Author : Matteo Dainese; Lars Thylén; Alfred Driessen; KTH; []
    Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Electrical engineering; silica-on-silicon technology; PACVD; plasma deposition; photonic integrated circuits; planar lightwave circuits; Elektroteknik; elektronik och fotonik; Electrical engineering; electronics and photonics; Elektroteknik; elektronik och fotonik;

    Abstract : The last two decades have witnessed a large increase in capacity in telecommunication systems, thanks to the development of high bandwidth, fiber optic based networks. Nevertheless the continuing growth of Internet data traffic, fuelled by the development of numerous services like on-line commerce, video on demand, large audio/video files downloads, demands for a significant increase in the ability of the network nodes to manage incoming and outcoming data streams effectively and fast. READ MORE

  5. 3. Noise Aspects of some Si-based One Port Devices and Carbon Nanotubes

    Author : Hassan Ouacha; Chalmers tekniska högskola; []
    Keywords : NATURVETENSKAP; NATURAL SCIENCES; etching; Schottky contacts; noise; fluctuations; generation; mobility; noise spectroscopy; recombination; p-n diodes; carbon nanotubes; thermal reaction; junction; defects; co-sputtering; irradiation; interface states; low frequency noise;

    Abstract : The p-n junctions and Schottky diodes based on Si1-xGex and SiC are of great importance in modern electronic applications, such as microwave detectors and mixers. Carbon nanotubes (CNTs) have appeared recently as an attractive new class of materials with a reduced dimensionality, and proposed as building blocks for nanoelectronic technology. READ MORE

  6. 4. Physical and chemical surface modifications of a polyimide to enhance its adhesion to silver

    Author : Åsa Sandgren; KTH; []
    Keywords : Polyimide; Polymer surface modification; Polymer metallisation; Plasma treatment; Animation rwaction; Nitration reaction; Silver sputtering; Polymer-metal adhesion; Wet-procedure; Sulfonation reaction; Chemical etching;

    Abstract : .... READ MORE

  7. 5. Design, Simulation and Characterization of Some Planar Lightwave Circuits

    Author : Yaocheng Shi; Anand Srinivasan; Sailing He; Daniel Erni; KTH; []
    Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; planar lightwave circuit; waveguide; coupler; multimode interference; photonic crystal waveguide; de multiplexer; triplexer; polarization beam splitter; dry etching; carrier life time.; Photonics; Fotonik;

    Abstract : Optical devices based on planar lightwave circuit (PLC) technology have the advantages of small size, high reliability, possibility for large scale production, and potential integration with electronics. These devices are widely employed in optical telecommunications, sensing, data storage, imaging, and signal processing. READ MORE