Search for dissertations about: "radio frequency microelectromechanical system RF MEMS"

Found 3 swedish dissertations containing the words radio frequency microelectromechanical system RF MEMS.

  1. 1. Monocrystalline-Silicon Based RF MEMS Devices

    Author : Mikael Sterner; Joachim Oberhammer; Roberto Sorrentino; KTH; []
    Keywords : RF MEMS; radio frequency; microelectromechanical system; microsystem technology; monocrystalline silicon; switch; tuneable capacitor; high-impedace surface; phase shifter; rectangular waveguide; transmission line;

    Abstract : This thesis presents novel radio-frequency microelectromechanical (RF MEMS) devices, for microwave and millimeter wave applications, designed for process robustness and operational reliability using monocrystalline silicon as structural material. Two families of RF MEMS devices are proposed. READ MORE

  2. 2. Novel RF MEMS Switch and Packaging Concepts

    Author : Joachim Oberhammer; KTH; []
    Keywords : 0-level packaging; adhesive bonding; BCB; benzocyclobutene; bond strength; contact printing; film actuator; glass lid encapsulation; glass lid packaging; helium leak test; hermetic packaging; hermeticity; high isolation switch; low stress silicon nitride; low volt; TECHNOLOGY; TEKNIKVETENSKAP;

    Abstract : Radio-frequency microelectromechanical systems (RF~MEMS) are highly miniaturized devices intended to switch, modulate, filter or tune electrical signals from DC to microwave frequencies. The micromachining techniques used to fabricate these components are based on the standard clean-room manufacturing processes for high-volume integrated semiconductor circuits. READ MORE

  3. 3. Integrated Antenna Solutions for Wireless Sensor and Millimeter-Wave Systems

    Author : Shi Cheng; Anders Rydberg; Paul Hallbjörner; Zhining Chen; Uppsala universitet; []
    Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; harmonic radar HR ; liquid alloy; millimeter-wave; micromachining; phase shifters; planar inverted cone antennas PICA ; printed circuit boards PCB ; quasi-Yagi antennas; radio frequency microelectromechanical system RF MEMS ; stretchable antennas; substrate integrate waveguides SIW ; T-matched dipole antennas; tapered slot antennas; traveling wave array antennas; ultrawideband UWB ; wireless sensor networks.; Electrical engineering; Elektroteknik; Elektronik; Electronics;

    Abstract : This thesis presents various integrated antenna solutions for different types of systems and applications, e.g. wireless sensors, broadband handsets, advanced base stations, MEMS-based reconfigurable front-ends, automotive anti-collision radars, and large area electronics. READ MORE