Search for dissertations about: "Arutiun P. Ehiasarian"

Found 1 swedish dissertation containing the words Arutiun P. Ehiasarian.

2. 1. Silicon Nitride Based Coatings Grown by Reactive Magnetron Sputtering

   Author : Tuomas Hänninen; Hans Högberg; Susann Schmidt; Lars Hultman; Arutiun P. Ehiasarian; Linköpings universitet; []
   Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY;

   Abstract : Silicon nitride and silicon nitride-based ceramics have several favorable material properties, such as high hardness and good wear resistance, which makes them important materials for the coating industry. This thesis focuses the synthesis of silicon nitride, silicon oxynitride, and silicon carbonitride thin films by reactive magnetron sputtering. READ MORE