Search for dissertations about: "Bernd Schultrich"
Found 1 swedish dissertation containing the words Bernd Schultrich.
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1. Sputtered Carbon Nitride Thin Films
Abstract : The relation between the growth conditions and the film structure and properties of reactively magnetron sputtered carbon nitride CNx (0 ≤ x ≤ 0.6) thin films has been studied. The growth of CNx films has been studied when varying the process parameters, such as substrate temperature, N2 (partial) pressure and ion flux. READ MORE
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