Search for dissertations about: "CMOS-compatible micromachining"

Found 4 swedish dissertations containing the words CMOS-compatible micromachining.

  2. 1. Micromachining by sacrificial aluminium etching

    Author : David Westberg; Chalmers tekniska högskola; []
    Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; sacrificial aluminium etching; SALE; CMOS-compatible micromachining; aluminium etching; densitometer; surface micromachining; nozzle; sacrificial etching; inkjet;

    Abstract : .... READ MORE

  4. 2. Towards an on-chip power supply: Integration of micro energy harvesting and storage techniques for wireless sensor networks

    Author : Agin Vyas; Chalmers tekniska högskola; []
    Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Microsuperca- pacitor; On-chip power supply.; Piezoelectric energy harvester; CMOS compatible; MEMS;

    Abstract : The lifetime of a power supply in a sensor node of a wireless sensor network is the decisive factor in the longevity of the system. Traditional Li-ion batteries cannot fulfill the demands of sensor networks that require a long operational duration. READ MORE

  5. 3. Assembly of microsystems for optical and fluidic applications

    Author : Sjoerd Haasl; Göran Stemme; Richard Syms; KTH; []
    Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Applied mechanics; microsystem technology; micromachining; assembly; active alignment; BCB; Teknisk mekanik; Engineering mechanics; Teknisk mekanik;

    Abstract : This thesis addresses assembly issues encountered in optical and fluidic microsystem applications. In optics, the first subject concerns the active alignment of components in optical fibersystems. READ MORE

  6. 4. On-chip electrochemical capacitors and piezoelectric energy harvesters for self-powering sensor nodes

    Author : Agin Vyas; Chalmers tekniska högskola; []
    Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Energy storage; 2DOF; sensor node; Energy harvesting; piezoelectric energy harvesters; graphene oxide; spin coating; MEMS; Microsupercapacitors;

    Abstract : On-chip sensing and communications in the Internet of things platform have benefited from the miniaturization of faster and low power complementary-metal-oxide semiconductor (CMOS) microelectronics. Micro-electromechanical systems technology (MEMS) and development of novel nanomaterials have further improved the performance of sensors and transducers while also demonstrating reduction in size and power consumption. READ MORE