Search for dissertations about: "Carl-fredrik Carlström"
Found 1 swedish dissertation containing the words Carl-fredrik Carlström.
University dissertation from Kista : Mikroelektronik och informationsteknik
Abstract : Dry etching is an important technique for pattern transferin fabrication of most opto-electronic devices, since it canprovide good control of both structure size and shape even on asub-micron scale. Unfortunately, this process step may causedamage to the material which is detrimental to deviceperformance. READ MORE