Search for dissertations about: "Carl-fredrik Carlström"

Found 1 swedish dissertation containing the words Carl-fredrik Carlström.

  1. 1. Ion beam etching of InP based materials

    University dissertation from Kista : Mikroelektronik och informationsteknik

    Author : Carl-Fredrik Carlström; KTH.; [2001]
    Keywords : InP; dry etching; ion beam etching; RIBE; CAIBE; hydrocarbon chemistry; trimethylamine; As P exchange reaction; morphology; low damage; AFM; SCM; annealing;

    Abstract : Dry etching is an important technique for pattern transferin fabrication of most opto-electronic devices, since it canprovide good control of both structure size and shape even on asub-micron scale. Unfortunately, this process step may causedamage to the material which is detrimental to deviceperformance. READ MORE