Search for dissertations about: "Christian Isheden"

Found 2 swedish dissertations containing the words Christian Isheden.

  2. 1. Source/drain engineering in advanced pMOS transistors

    Author : Christian Isheden; KTH; []
    Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Electronics; Elektronik;

    Abstract : .... READ MORE

  4. 2. Source and drain engineering in SiGe-based pMOS transistors

    Author : Christian Isheden; Mikael Östling; Simon Deleonibus; KTH; []
    Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Electronics; SiGe; source drain; shallow junctions; pMOS; process integration; CVD; epitaxy; etching; Ni silicide; contact resistivity; Elektronik; Electronics; Elektronik;

    Abstract : A new shallow junction formation process, based on selective silicon etching followed by selective growth of in situ B-doped SiGe, is presented. The approach is advantageous compared to conventional ion implantation followed by thermal activation, because perfectly abrupt, low resistivity junctions of arbitrary depth can be obtained. READ MORE