Search for dissertations about: "Critical Dimension Measurement"

Found 5 swedish dissertations containing the words Critical Dimension Measurement.

  1. 1. Improved inspection and micrometrology of embedded structures in multi-layered ceramics : Development of optical coherence tomographic methods and tools

    Author : Rong Su; Lars Mattsson; Peter Ekberg; Jerzy Pluciński; KTH; []
    Keywords : Metrology; Optical Coherence Tomography; Ceramics; Embedded Structure; Multilayer; Nondestructive Testing; Optical Inspection; Critical Dimension Measurement; Infrared Imaging; Scattering; Mie Calculation; Image Processing; Monte Carlo Simulation; 测量学, 光学相干断层扫描术,陶瓷,嵌入式结构,多层,无损检测,光学检测,关键尺寸测量,红外成像,散射,Mie计算,图像处理,Monte Carlo模拟; SRA - Production; SRA - Produktion;

    Abstract : Roll-to-roll manufacturing of micro components based on advanced printing, structuring and lamination of ceramic tapes is rapidly progressing. This large-scale and cost-effective manufacturing process of ceramic micro devices is however prone to hide defects within the visually opaque tape stacks. READ MORE

  2. 2. Development of ultra-precision tools for metrology and lithography of large area photomasks and high definition displays

    Author : Lars Peter Ekberg; Lars Mattsson; Lars Stiblert; Richard Leach; KTH; []
    Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Ultra precision 2D metrology; LCD-display; OLED-display; nm-resolution; random phase measurement; large area; photomask; acousto-optic deflection; self-calibration; Z-correction; absolute accuracy; uncertainty.; SRA - Production; SRA - Produktion;

    Abstract : Large area flat displays are nowadays considered being a commodity. After the era of bulky CRT TV technology, LCD and OLED have taken over as the most prevalent technologies for high quality image display devices. READ MORE

  3. 3. Statistical gas distribution modelling for mobile robot applications

    Author : Matteo Reggente; Achim Lilienthal; Krishna Persaud; Örebro universitet; []
    Keywords : NATURVETENSKAP; NATURAL SCIENCES; statistical modelling; gas distribution mapping; mobile robots; gas sensors; kernel density estimation; Gaussian kernel; Datavetenskap; Computer Science;

    Abstract : In this dissertation, we present and evaluate algorithms for statistical gas distribution modelling in mobile robot applications. We derive a representation of the gas distribution in natural environments using gas measurements collected with mobile robots. READ MORE

  4. 4. Figures of time : on the phenomenology of cinema and temporality

    Author : Malin Wahlberg; Michael Renov; Stockholms universitet; []
    Keywords : HUMANIORA; HUMANITIES; film theory; phenomenology; aesthetic theory; temporality; duration; speed; photography; city film; documentary; experimental cinema; Film; Filmvetenskap; Cinema Studies; filmvetenskap;

    Abstract : Image and time represent a favored issue among theorists and practitioners in the history of cinema, where discussion is related to the ingenious machine, the new art, as well as the experience of film. Looking back on this debate, and considering recent accounts of 'time-images,' it is striking to note how the problem has always oscillated between issues of the medium specific and issues of film experience; that is, the ontology of cinema as a time-bound medium, the quality of rhythm, duration, and recorded views, and, not least, the sensory and affective impact of mediated sound-images. READ MORE

  5. 5. Drowning-out crystallisation of benzoic acid : Influence of processing conditions and solvent composition on crystal size and shape

    Author : Xiomara Holmbäck; KTH; []
    Keywords : solvent effect; drowning-out; crystallization; benzoic acid; solubility; crystal habit; crystal growth; interfacial energy; growth mechanism;

    Abstract : The aim of the present investigation is to increase theunderstanding of the role played by the solvent in inhibitingor enhancing crystal growth. Drowning-out crystallizationexperiments has been performed by the controlled addition ofwater or ethanol water mixtures to a saturated solution ofbenzoic acid in ethanol-water mixtures. READ MORE