Search for dissertations about: "Cu thd 2"
Found 1 swedish dissertation containing the words Cu thd 2.
University dissertation from Uppsala : Acta Universitatis Upsaliensis
Abstract : The high electric and thermal conductivity of copper has made it to a prime candidate as interconnect material in future integrated circuits. In this thesis, Atomic Layer Epitaxy has been used to deposit thin copper films on a variety of substrates, using both CuCl and Cu(II)2,2,6,6-tetramethyl-3,5-heptanedionate, Cu(thd)2, as precursors and hydrogen as reducing agent. READ MORE