Search for dissertations about: "DCMS"

Showing result 1 - 5 of 16 swedish dissertations containing the word DCMS.

  1. 1. Synthesis and Characterization of Transition Metal Diborides

    Author : Jimmy Thörnberg; Johanna Rosén; Per Persson; Helmut Riedl; Linköpings universitet; []
    Keywords : NATURAL SCIENCES; NATURVETENSKAP; NATURVETENSKAP; NATURAL SCIENCES; DCMS; HiPIMS; Titanium Diboride; Titanium Aluminum Diboride; Chromium Diboride; Microstructure; Hardness; Oxidation Resistance;

    Abstract : This thesis is devoted towards physical vapor deposition (PVD) of thin films of transition-metal (TM) diborides, focused on the material system TiBx, Ti1-xAlxB2-y and CrBx. The metal diborides are a large family of compounds with both metallic and ceramic properties, due to its bonding nature being a mix of covalent and ionic bonds. READ MORE

  2. 2. Carbon based Thin Films Prepared by HiPIMS and DCMS

    Author : Susann Schmidt; Lars Hultman; Grzegorz Greczynski; Jörg Neidhardt; Linköpings universitet; []
    Keywords : ;

    Abstract : The present thesis focuses on carbon based thin films prepared by high power impulse magnetron sputtering (HiPIMS) and direct current magnetron sputtering (DCMS). The properties of such thin films can be tailored to an extensive variety; the film microstructure, for example, ranges in the presented work from fully amorphous, graphitic films to fullerene like (FL). READ MORE

  3. 3. Reactive High Power Impulse Magnetron Sputtering of Metal Oxides

    Author : Montri Aiempanakit; Ulf Helmersson; Tomas Kubart; Straňák Vítězslav; Linköpings universitet; []
    Keywords : ;

    Abstract : The work presented in this thesis deals with reactive magnetron sputtering processes of metal oxides with a prime focus on high power impulse magnetron sputtering (HiPIMS). The aim of the research is to contribute towards understanding of the fundamental mechanisms governing a reactive HiPIMS process and to investigate their implications on the film growth. READ MORE

  4. 4. Fundamental aspects of HiPIMS under industrial conditions

    Author : Mattias Samuelsson; Ulf Helmersson; Torbjörn Joelsson; Hans Högberg; Bengt Wälivaara; Jörg Patscheider; Linköpings universitet; []
    Keywords : ;

    Abstract : Fundamental aspects of the high power impulse magnetron sputtering (HiPIMS) process and its implication for film growth under industrial conditions have been studied. The emerging HiPIMS technique exhibits a higher plasma density and an enhanced degree of ionisation of sputtered material as compared to conventional direct current magnetron sputtering (DCMS). READ MORE

  5. 5. Plasma properties in high power impulse magnetron sputtering

    Author : Daniel Lundin; Ulf Helmersson; Jon Tomas Gudmundsson; Linköpings universitet; []
    Keywords : NATURAL SCIENCES; NATURVETENSKAP; NATURVETENSKAP; NATURAL SCIENCES; HiPIMS; HPPMS; plasma; plasma transport; plasma instabilities; Plasma physics; Plasmafysik;

    Abstract : The work presented in this thesis involves experimental and theoretical studies related to plasma properties in high power impulse magnetron sputtering (HiPIMS), and more specifically plasma transport. HiPIMS is an ionized PVD method based on conventional direct current magnetron sputtering (dcMS). READ MORE