Search for dissertations about: "DUV lithography"

Found 4 swedish dissertations containing the words DUV lithography.

  2. 1. Bioelectronic Nanosensor Devices for Environmental and Biomedical Analysis

    Author : Klas Risveden; Tillämpad biokemi; []
    Keywords : NATURVETENSKAP; NATURAL SCIENCES; Regional Ion Sensitive Field Effect Transistor; Region Ion Sensitive Field Effect Transistor; RISFET; Conducting channel; Bioelectronic Nanosensor; Bioelectronic; Biosensor; Nanosensor; Chemical Sensor; Sensor; Semiconductor sensor; Single molecule trapping; Scaling; Protein trapping; Nanoelectronics; Lab-on-a-chip; pico-ammeter; Nanobiosensor; Sample Applicator; Sequential Batch Analysis; Sequential Batch Analysis System; SBAS; Nanowire; Branched nanowire structure; Nanotree; Nanorod; Nano processing; Micro processing; Electron Beam Lithography; EBL; UV-lithography; Molecular Imprinting; DUV-lithography; Moleculary Imprinted Polymers; MIP; Biomimetics; QCM; Biomimetic sensor; Quartz Crystal Microbalance; QCM-D; Nanoparticles; Acetylcholine esterase; Glucose oxidase; Glucose; Gluconolactone; Propranolol; Gluconate; Carbofuran; Neurotoxic; Environmental analysis; Biomedical Analysis; Biotechnology; Medicine; Pesticide; Food Technology; Analyis; Flow Injection Analysis; FIA; Scanning Probe Microscopy; Scanning Kelvin Probe Microscopy; SPM; KPM; AFM; SKM; KPFM; SKPM; Nanostructures.; Atomic Force Microscopy; KFM;

    Abstract : A new type of Bioelectronic Nanosensor Device with potential applications in medicine,biotechnology and environmental analysis was designed. The nanosensor is based on RISFET (Regional Ion Sensitive Field Effect Transistor) technology. READ MORE

  4. 2. Electrochemical and mechanical thin film sensors

    Author : Lars Henrik Skjolding; Fasta tillståndets fysik; []
    Keywords : NATURVETENSKAP; NATURAL SCIENCES; vancomycin; electrochemistry; transducer; DUV lithography; nanoimprint lithography; thin film; cantilever; sensor; interdigitated electrode; electrostatic interaction; mix-and-match processing; bacteria; Fysicumarkivet A:2010:Skjolding;

    Abstract : This thesis focuses on the study of thin-film sensor technologies, novel microfabrication technologies, and thin-film technology in general. The work discusses electrochemical sensors and mechanical sensor technologies as well as fabrication strategies for them. READ MORE

  5. 3. Nanopatterning by Swift Heavy Ions

    Author : Marek Skupinski; Klas Hjört; Jens Jensen; Christina Trautmann; Uppsala universitet; []
    Keywords : Materials science; swift heavy ions; lithography; nanopatterning; self-assembly; Materialvetenskap;

    Abstract : Today, the dominating way of patterning nanosystems is by irradiation-based lithography (e-beam, DUV, EUV, and ions). Compared to the other irradiations, ion tracks created by swift heavy ions in matter give the highest contrast, and its inelastic scattering facilitate minute widening and high aspect ratios (up to several thousands). READ MORE

  6. 4. Laser-Plasma Sources for Extreme-Ultraviolet Lithography

    Author : Björn Hansson; KTH; []
    Keywords : fluid and plasma; radiation; electronics; electrical;

    Abstract : This thesis describes the development and characterizationof a liquidxenon- jet laser-plasma source forextreme-ultraviolet (EUV) radiation. It is shown how thissource may be suitable for production-scale EUV lithography(EUVL). READ MORE