Search for dissertations about: "Daniel Magnfält"
Found 2 swedish dissertations containing the words Daniel Magnfält.
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1. Nucleation and stress generation in thin films deposited with a pulsed energetic deposition flux
Abstract : This thesis presents fundamental mechanisms of nucleation and early growth of and stress generation in thin polycrystalline metal films deposited using pulsed energetic deposition fluxes. The effects of a pulsed deposition flux and energetic bombardment on film nucleation was investigated using in situ stress measurements and in situ ellipsometry to determine the film thickness at which the films become continuous. READ MORE
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2. Fundamental processes in thin film growth : The origin of compressive stress and the dynamics of the early growth stages
Abstract : The fundamental mechanisms behind the generation of compressive stresses in polycrystalline thin films, the effects of pulsed deposition fluxes on the dynamics of the early growth stages as well as the generation of energetic Ar+ ions in high power impulse magnetron sputtering (HiPIMS) discharges has been studied in this thesis.It was found that compressive film stresses in Mo films deposited using energetic vapor fluxes are correlated with high film densities while only a slight lattice expansion compared to relaxed Mo was found. READ MORE
