Search for dissertations about: "Deep Reactive Ion Etching"
Showing result 1 - 5 of 8 swedish dissertations containing the words Deep Reactive Ion Etching.
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1. Two-Dimensional Photonic Crystals in InP-based Materials
Abstract : Photonic crystals (PhCs) are structures periodic in thedielectric constant. They exhibit a photonic bandgap, i.e., arange of wavelengths for which light propagation is forbidden. READ MORE
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2. Submillimeter-Wave Waveguide Frontends by Silicon-on-Insulator Micromachining
Abstract : This thesis presents novel radiofrequency (RF) frontend components in the submillimeter-wave (sub-mmW) range implemented by silicon micromachining, or deep reactive ion etching (DRIE). DRIE is rapidly becoming a driving technology for the fabrication of waveguide components and systems when approaching the terahertz (THz) frequency range. READ MORE
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3. Silicon micromachined waveguide components for terahertz systems
Abstract : This thesis presents silicon micromachined waveguide components for sub-terahertz and terahertz (THz) systems fabricated by deep reactive ion etching (DRIE). Historically the main driving force for the development of THz systems has been space-based scientific instruments for astrophysics, planetary and Earth science missions. READ MORE
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4. Micromachined Interfaces for Medical and Biochemical Applications
Abstract : .... READ MORE
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5. Advanced MEMS Technology for Terahertz Frequencies
Abstract : With the development of terahertz (THz) technology, a variety of application demands are growing rapidly, such as high-rate communications, THz radars, environmental monitoring, medical imaging, and space exploration. However, the fabrication, integration, and packaging techniques for THz components and systems pose great challenges for a large-scale, cost-effective production. READ MORE