Search for dissertations about: "Etching"
Showing result 1 - 5 of 245 swedish dissertations containing the word Etching.
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1. Micromachining by sacrificial aluminium etching
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2. Ion beam etching of InP based materials
Abstract : Dry etching is an important technique for pattern transferin fabrication of most opto-electronic devices, since it canprovide good control of both structure size and shape even on asub-micron scale. Unfortunately, this process step may causedamage to the material which is detrimental to deviceperformance. READ MORE
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3. Epitaxial growth, processing and characterisation of III-V semiconductor micro- and nanostructures
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4. Two-Dimensional Photonic Crystals in InP-based Materials
Abstract : Photonic crystals (PhCs) are structures periodic in thedielectric constant. They exhibit a photonic bandgap, i.e., arange of wavelengths for which light propagation is forbidden. READ MORE
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5. Fabrication of Low-Dimensional Structures in III-V Semiconductors
Abstract : The thesis presents studies on the processing technology and the characterization of nanometer-sized and low-dimensional structures in III-V semiconductors. Two major approaches are described: 1) the combination of aerosol technology and plasma etching for the fabrication of quantum dots (QDs) in InP-based materials and 2) the use of high-resolution electron beam lithography and plasma or wet chemical etching to make quantum well wires (QWWs) in both GaAs and InP-based structures. READ MORE