Search for dissertations about: "Eugene A. Fitzgerald"

Found 1 swedish dissertation containing the words Eugene A. Fitzgerald.

2. 1. Integration of epitaxial SiGe(C) layers in advanced CMOS devices

   Author : Julius Hållstedt; Henry Radamson; Eugene A. Fitzgerald; KTH; []
   Keywords : NATURVETENSKAP; NATURAL SCIENCES; Silicon Germanium Carbon SiGeC ; Chemical Vapor Deposition CVD ; Epitaxy; Pattern Dependency; MOSFET; Mobility; Spacer Gate Technology; Semiconductor physics; Halvledarfysik;

   Abstract : Heteroepitaxial SiGe(C) layers have attracted immense attention as a material for performance boost in state of the art electronic devices during recent years. Alloying silicon with germanium and carbon add exclusive opportunities for strain and bandgap engineering. READ MORE