Search for dissertations about: "HIPIMS"

Showing result 16 - 20 of 37 swedish dissertations containing the word HIPIMS.

  2. 16. High power impulse magnetron sputtering under industrial conditions

    Author : Mattias Samuelsson; Ulf Helmersson; Torbjörn Joelsson; Hans Högberg; Bengt Wälivaara; Tomáš Kubart; Linköpings universitet; []
    Keywords : NATURAL SCIENCES; NATURVETENSKAP;

    Abstract : In this thesis, the recent development step of magnetron sputtering, termed high power impulse magnetron sputtering (HiPIMS) has been studied. Compared to conventional magnetron sputtering HiPIMS provides a higher plasma density which can ionise the sputtered material. READ MORE

  4. 17. Synthesis of Carbon-based and Metal-Oxide Thin Films using High Power Impulse Magnetron Sputtering

    Author : Asim Aijaz; Ulf Helmersson; Kostas Sarakinos; Günter Bräuer; Linköpings universitet; []
    Keywords : ;

    Abstract : The work presented in this thesis deals with synthesis of carbon-based as well as metal-oxide thin films using highly ionized plasmas. The principal deposition method employed was high power impulse magnetron sputtering (HiPIMS). READ MORE

  5. 18. Reactive High Power Impulse Magnetron Sputtering of Metal Oxides

    Author : Montri Aiempanakit; Ulf Helmersson; Tomas Kubart; Straňák Vítězslav; Linköpings universitet; []
    Keywords : ;

    Abstract : The work presented in this thesis deals with reactive magnetron sputtering processes of metal oxides with a prime focus on high power impulse magnetron sputtering (HiPIMS). The aim of the research is to contribute towards understanding of the fundamental mechanisms governing a reactive HiPIMS process and to investigate their implications on the film growth. READ MORE

  6. 19. Modeling High Power Impulse Magnetron Sputtering Discharges

    Author : Chunqing Huo; Nils Brenning; Svetlana Ratynskaia; James Bradley; KTH; []
    Keywords : ;

    Abstract : HiPIMS, high power impulse magnetron sputtering, is a promising technology that has attracted a lot of attention ever since its appearance. A time-dependent plasma discharge model has been developed for the ionization region in HiPIMS discharges. READ MORE

  7. 20. Effect of metal ion irradiation on hard coating synthesis by physical vapor deposition

    Author : Tun-Wei Hsu; Magnus Odén; Grzegorz Greczynski; Sven Ulrich; Linköpings universitet; []
    Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; NATURVETENSKAP; NATURAL SCIENCES;

    Abstract : The aim of this thesis is to understand and control how the ions in the plasma influence the film growth during thin film deposition processes. Two physical vapor deposition (PVD) techniques are investigated, namely magnetron sputtering and cathodic arc evaporation. READ MORE