Search for dissertations about: "HPPMS"

Found 3 swedish dissertations containing the word HPPMS.

2. 1. Plasma Characterization & Thin Film Growth and Analysis in Highly Ionized Magnetron Sputtering

   Author : Jones Alami; Ulf Helmersson; James Bradley; Linköpings universitet; []
   Keywords : Highly ionized pulsed magnetron sputtering; HPPMS; HPPIMS; thin film; plasma analysis; Langmuir probe; TECHNOLOGY; TEKNIKVETENSKAP;

   Abstract : The present thesis addresses two research areas related to film growth in a highly ionized magnetron sputtering system: plasma characterization, and thin film growth and analysis. The deposition technique used is called high power pulsed magnetron sputtering (HPPMS). READ MORE

4. 2. Plasma properties in high power impulse magnetron sputtering

   Author : Daniel Lundin; Ulf Helmersson; Jon Tomas Gudmundsson; Linköpings universitet; []
   Keywords : NATURVETENSKAP; NATURAL SCIENCES; HiPIMS; HPPMS; plasma; plasma transport; plasma instabilities; Plasma physics; Plasmafysik;

   Abstract : The work presented in this thesis involves experimental and theoretical studies related to plasma properties in high power impulse magnetron sputtering (HiPIMS), and more specifically plasma transport. HiPIMS is an ionized PVD method based on conventional direct current magnetron sputtering (dcMS). READ MORE

5. 3. The effect of extreme power densities applied to a planar magnetron

   Author : Johan Böhlmark; Linköpings universitet; []
   Keywords : NATURVETENSKAP; NATURAL SCIENCES;

   Abstract : In plasma assisted thin film growth control over the energy and direction of the incoming species is desired. If the growth species are ionized this can be achieved by the use of a substrate bias. ions may be accelerated by an applied potential, whereas neutral particles may not. READ MORE