Search for dissertations about: "High Power Pulsed Magnetron Sputtering"

Showing result 1 - 5 of 15 swedish dissertations containing the words High Power Pulsed Magnetron Sputtering.

  2. 1. Fundamentals of High Power Impulse Magnetron Sputtering

    Author : Johan Böhlmark; Ulf Helmersson; André Anders; Linköpings universitet; []
    Keywords : NATURVETENSKAP; NATURAL SCIENCES; Plasma; Pulsed plasma; High Power Pulsed Magnetron Sputtering; Plasma Characterization; Physics; Fysik;

    Abstract : In plasma assisted thin film growth, control over the energy and direction of the incoming species is desired. If the growth species are ionized this can be achieved by the use of a substrate bias or a magnetic field. Ions may be accelerated by an applied potential, whereas neutral particles may not. READ MORE

  4. 2. Plasma characterisation in high power pulsed magnetron sputtering

    Author : Jones Alami; Linköpings universitet; []
    Keywords : NATURVETENSKAP; NATURAL SCIENCES;

    Abstract : In this thesis, plasma parameters including plasma and floating potentials, electron energy distribution function (EEDF) plasma density and electron temperature are studied in a high power pulsed magnetron (HPPM) discharge at different Argon (Ar) gas pressures and different magnetron powers. It is reported that the EEDF during and shortly after the pulse can be represented by a bi-Maxwellian distribution indicating two energy groups of electrons. READ MORE

  5. 3. Modeling High Power Impulse Magnetron Sputtering Discharges

    Author : Chunqing Huo; Nils Brenning; Svetlana Ratynskaia; James Bradley; KTH; []
    Keywords : ;

    Abstract : HiPIMS, high power impulse magnetron sputtering, is a promising technology that has attracted a lot of attention ever since its appearance. A time-dependent plasma discharge model has been developed for the ionization region in HiPIMS discharges. READ MORE

  6. 4. High power impulse magnetron sputtering under industrial conditions

    Author : Mattias Samuelsson; Ulf Helmersson; Torbjörn Joelsson; Hans Högberg; Bengt Wälivaara; Tomáš Kubart; Linköpings universitet; []
    Keywords : NATURAL SCIENCES; NATURVETENSKAP;

    Abstract : In this thesis, the recent development step of magnetron sputtering, termed high power impulse magnetron sputtering (HiPIMS) has been studied. Compared to conventional magnetron sputtering HiPIMS provides a higher plasma density which can ionise the sputtered material. READ MORE

  7. 5. Modeling and Experimental Studies of High Power Impulse Magnetron Sputtering Discharges

    Author : Chunqing Huo; Nils Brenning; James Bradley; KTH; []
    Keywords : ;

    Abstract : HiPIMS, high power impulse magnetron sputtering, is a promising technology that has attracted a lot of attention, ever since it was introduced in 1999. A time-dependent plasma discharge model has been developed for the ionization region (IRM) in HiPIMS discharges. READ MORE