Search for dissertations about: "High power impulse magnetron sputtering HiPIMS"

Showing result 1 - 5 of 30 swedish dissertations containing the words High power impulse magnetron sputtering HiPIMS.

  1. 1. Fundamentals of High Power Impulse Magnetron Sputtering

    Author : Johan Böhlmark; Ulf Helmersson; André Anders; Linköpings universitet; []
    Keywords : NATURAL SCIENCES; NATURVETENSKAP; Plasma; Pulsed plasma; High Power Pulsed Magnetron Sputtering; Plasma Characterization; Physics; Fysik;

    Abstract : In plasma assisted thin film growth, control over the energy and direction of the incoming species is desired. If the growth species are ionized this can be achieved by the use of a substrate bias or a magnetic field. Ions may be accelerated by an applied potential, whereas neutral particles may not. READ MORE

  2. 2. Plasma properties in high power impulse magnetron sputtering

    Author : Daniel Lundin; Ulf Helmersson; Jon Tomas Gudmundsson; Linköpings universitet; []
    Keywords : NATURAL SCIENCES; NATURVETENSKAP; NATURVETENSKAP; NATURAL SCIENCES; HiPIMS; HPPMS; plasma; plasma transport; plasma instabilities; Plasma physics; Plasmafysik;

    Abstract : The work presented in this thesis involves experimental and theoretical studies related to plasma properties in high power impulse magnetron sputtering (HiPIMS), and more specifically plasma transport. HiPIMS is an ionized PVD method based on conventional direct current magnetron sputtering (dcMS). READ MORE

  3. 3. Modeling High Power Impulse Magnetron Sputtering Discharges

    Author : Chunqing Huo; Nils Brenning; Svetlana Ratynskaia; James Bradley; KTH; []
    Keywords : ;

    Abstract : HiPIMS, high power impulse magnetron sputtering, is a promising technology that has attracted a lot of attention ever since its appearance. A time-dependent plasma discharge model has been developed for the ionization region in HiPIMS discharges. READ MORE

  4. 4. High power impulse magnetron sputtering under industrial conditions

    Author : Mattias Samuelsson; Ulf Helmersson; Torbjörn Joelsson; Hans Högberg; Bengt Wälivaara; Tomáš Kubart; Linköpings universitet; []
    Keywords : NATURAL SCIENCES; NATURVETENSKAP;

    Abstract : In this thesis, the recent development step of magnetron sputtering, termed high power impulse magnetron sputtering (HiPIMS) has been studied. Compared to conventional magnetron sputtering HiPIMS provides a higher plasma density which can ionise the sputtered material. READ MORE

  5. 5. Alumina Thin Films : From Computer Calculations to Cutting Tools

    Author : Erik Wallin; Ulf Helmersson; Patrick Desjardins; Linköpings universitet; []
    Keywords : ENGINEERING AND TECHNOLOGY; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; TEKNIK OCH TEKNOLOGIER; NATURAL SCIENCES; NATURVETENSKAP; NATURVETENSKAP; TEKNIK OCH TEKNOLOGIER; TEKNIK OCH TEKNOLOGIER; NATURAL SCIENCES; ENGINEERING AND TECHNOLOGY; ENGINEERING AND TECHNOLOGY; Alumina; thin films; coatings; sputtering; density functional theory; high power impulse magnetron sputtering; HIPIMS; Material physics with surface physics; Materialfysik med ytfysik; Surface engineering; Ytbehandlingsteknik; Surfaces and interfaces; Ytor och mellanytor;

    Abstract : The work presented in this thesis deals with experimental and theoretical studies related to alumina thin films. Alumina, Al2O3, is a polymorphic material utilized in a variety of applications, e.g., in the form of thin films. READ MORE