Search for dissertations about: "High power impulse magnetron sputtering HiPIMS"

Showing result 21 - 25 of 33 swedish dissertations containing the words High power impulse magnetron sputtering HiPIMS.

  2. 21. Silicon Oxynitride Thin Films Grown by Reactive HiPIMS

    Author : Tuomas Hänninen; Hans Högberg; Susann Schmidt; Lars Hultman; Jón Tómas Guðmundsson; Linköpings universitet; []
    Keywords : NATURVETENSKAP; NATURAL SCIENCES;

    Abstract : Amorphous silicon oxynitride (SiOxNy) thin films were grown by reactive high power impulse magnetron sputtering from a pure silicon target in Ar/N2O plasmas. The elemental composition of the films was shown to depend on the target surface conditions during the film deposition, as well as on the reactive gas flow rate. READ MORE

  4. 22. Magnetron Sputter Epitaxy of GaN Epilayers and Nanorods

    Author : Muhammad Junaid; Jens Birch; Lars Hultman; K. Scott Butcher; Linköpings universitet; []
    Keywords : ;

    Abstract : In this research, electronic-grade GaN(0001) epilayers and nanorods have been grown onto Al2O3(0001) and Si(111) substrates, respectively, by reactive magnetron sputter epitaxy (MSE) using liquid Ga as a sputtering target. MSE, employing ultra high vacuum conditions, high-purity source materials, and lowenergy ion assisted deposition from substrate biasing, is a scalable method, lending itself to large area GaN synthesis. READ MORE

  5. 23. Carbon based Thin Films Prepared by HiPIMS and DCMS

    Author : Susann Schmidt; Lars Hultman; Grzegorz Greczynski; Jörg Neidhardt; Linköpings universitet; []
    Keywords : ;

    Abstract : The present thesis focuses on carbon based thin films prepared by high power impulse magnetron sputtering (HiPIMS) and direct current magnetron sputtering (DCMS). The properties of such thin films can be tailored to an extensive variety; the film microstructure, for example, ranges in the presented work from fully amorphous, graphitic films to fullerene like (FL). READ MORE

  6. 24. Carbon Nitride and Carbon Fluoride Thin Films Prepared by HiPIMS

    Author : Susann Schmidt; Lars Hultman; Grzegorz Greczynski; Charanjit Singh Bhatia; Linköpings universitet; []
    Keywords : ;

    Abstract : The present thesis focuses on carbon based thin films prepared by high power impulse magnetron sputtering (HiPIMS) and direct current magnetron sputtering (DCMS). Carbon nitride (CNx: 0 < x < 0.20) as well as carbon fluoride (CFx: 0.16 < x < 0. READ MORE

  7. 25. Plasma Enhanced Chemical- and Physical- Vapor Depositions Using Hollow Cathodes

    Author : Kaspars Siliņš; Hana Barankova; Ladislav Bardos; Claes Nender; Uppsala universitet; []
    Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Hollow cathode; TiN; AlN; amorphous carbon; hybrid PVD PE-CVD; ionized magnetron;

    Abstract : Development of coating deposition technologies, in terms of performance and costs, is an ongoing process. A promising class of deposition technologies are based on hollow cathode discharges. READ MORE