Search for dissertations about: "Ivan Petrov"

Found 4 swedish dissertations containing the words Ivan Petrov.

  2. 1. AlN and High-k Thin Films for IC and Electroacoustic Applications

    Author : Fredrik Engelmark; Ivan Petrov; Uppsala universitet; []
    Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Electronics; Elektronik; Electronics; Elektronik; Elektronik; Electronics;

    Abstract : Further, a highly selective dry etch process for etching Al on AlN has been developed for the fabrication of MIM, MIS, SAW and BAW test structures for electrical and electroacoustic characterization of the films. A dielectric constant of 10 for AlN and 25 for Ti doped Ta2O5 have been measured. READ MORE

  4. 2. Nanostructural design of transition metal nitride thin films

    Author : Torbjörn Joelsson; Ivan Petrov; Linköpings universitet; []
    Keywords : NATURAL SCIENCES; NATURVETENSKAP;

    Abstract : Early transition metal nitrides have found extensive use in a range of thin film applications. We are just beginning to understand their growth from vapor phase deposition and microstructure-property relationships. READ MORE

  5. 3. Reactive Sputtering of Cubic-Phase BN:C and Nanostructured B-N-C Films : Growth, Microstructure, and Mechanical Properties

    Author : Mats P. Johansson; Ivan Petrov; Linköpings universitet; []
    Keywords : NATURVETENSKAP; NATURAL SCIENCES; NATURVETENSKAP; NATURAL SCIENCES;

    Abstract : Synthesis, structure, and mechanical property related issues in the carbon-containing boron nitride (BN:C) system have been studied. Magnetron sputtering, comprising a B4C target in mixed Ar-N2 discharges and deposition parameters of low ion energy, high ion-to-neutral flux ratio, and substrate temperatures ... READ MORE

  6. 4. Toward Energy-efficient Physical Vapor Deposition : Routes for Replacing Substrate Heating during Magnetron Sputtering by Employing Metal Ion Irradiation

    Author : Xiao Li; Grzegorz Greczynski; Ivan Petrov; Lars Hultman; Jyh-Wei Lee; Linköpings universitet; []
    Keywords : NATURVETENSKAP; NATURAL SCIENCES; PVD; Magnetron sputtering; Thin films; HiPIMS; TiAlN; Energy efficiency;

    Abstract : In this Thesis, magnetron sputtering is perfected as an environmental-friendly deposition technique. I performed systematic studies of a novel approach - hybrid high-power impulse and dc magnetron co-sputtering (HiPIMS/DCMS) with metal-ion-synchronized substrate bias pulses. READ MORE