Search for dissertations about: "Johan Pejnefors"

Found 1 swedish dissertation containing the words Johan Pejnefors.

2. 1. Chemical Vapor Depositionof Si and SiGe Films for High-Speed Bipolar Transistors

   Author : Johan Pejnefors; KTH; []
   Keywords : chemical vapor deposition CVD ; bipolar junction transistor BJT ; heterojunction bipolar transistor HBT ; silicon-germanium SiGe ; epitaxy; poly-Si emitter; in situ doping; non-selective epitaxy NSEG ; loading effect; emissivity effect;

   Abstract : This thesis deals with the main aspects in chemical vapordeposition (CVD) of silicon (Si) and silicon-germanium (Si1-xGex) films for high-speed bipolar transistors.In situdoping of polycrystalline silicon (poly-Si)using phosphine (PH3) and disilane (Si2H6) in a low-pressure CVD reactor was investigated toestablish a poly-Si emitter fabrication process. READ MORE