Search for dissertations about: "Johan Seger"

Found 1 swedish dissertation containing the words Johan Seger.

  2. 1. Interaction of Ni with SiGe for electrical contacts in CMOS technology

    Author : Johan Seger; Shi-Li Zhang; Christian Lavoie; KTH; []
    Keywords : NATURVETENSKAP; NATURAL SCIENCES; Physics; MOSFET; NiSi; SiGe; phase formation; morphological stability; Fysik; Physics; Fysik;

    Abstract : This thesis investigates the reactive formation of Ni mono-gernanosilicide, NiSi1-uGeu, for contact metallization of future CMOS devices where Si1-xGex can be present in the gate, source and drain of a MOSFET. Although the investigation has been pursued with a strong focus on materials aspects, issues related to process integration in MOSFETs both on conventional bulk Si and ultra-thin body SOI have been taken into consideration. READ MORE