Search for dissertations about: "Jonas Sundqvist"

Found 1 swedish dissertation containing the words Jonas Sundqvist.

2. 1. Employing Metal Iodides and Oxygen in ALD and CVD of Functional Metal Oxides

   Author : Jonas Sundqvist; Anders Hårsta; Roy Gordon; Uppsala universitet; []
   Keywords : NATURVETENSKAP; NATURAL SCIENCES; Inorganic chemistry; CVD; ALD; tantalum oxide; hafnium oxide; tin oxide; epitaxy; Ta2O5; HfO2; SnO2; XRD; Oorganisk kemi; Inorganic chemistry; Oorganisk kemi; Inorganic Chemistry; Oorganisk kemi;

   Abstract : Many materials exhibit interesting and novel properties when prepared as thin films. Thin film metal oxides have had an impact on the technological progress of the microelectronics mainly due to their electrical and optical properties. READ MORE