Search for dissertations about: "Julius Hållstedt"

Found 2 swedish dissertations containing the words Julius Hållstedt.

  1. 1. Epitaxy and characterization of SiGeC layers grown by reduced pressure chemical vapor deposition

    University dissertation from Kista : Mikroelektronik och informationsteknik

    Author : Julius Hållstedt; KTH.; [2004]
    Keywords : Silicon germanium carbon SiGeC ; Epitaxy; Chemical vapor deposition CVD ; Loading effect; High resolution x-ray diffraction HRXRD ; Hall measurements; Atomic force microscopy AFM .;

    Abstract : Heteroepitaxial SiGeC layers have attracted immenseattention as a material for high frequency devices duringrecent years. The unique properties of integrating carbon inSiGe are the additional freedom for strain and bandgapengineering as well as allowing more aggressive device designdue to the potential for increased thermal budget duringprocessing. READ MORE

  2. 2. Integration of epitaxial SiGe(C) layers in advanced CMOS devices

    University dissertation from Stockholm : KTH

    Author : Julius Hållstedt; KTH.; [2007]
    Keywords : NATURVETENSKAP; NATURAL SCIENCES; Silicon Germanium Carbon SiGeC ; Chemical Vapor Deposition CVD ; Epitaxy; Pattern Dependency; MOSFET; Mobility; Spacer Gate Technology; NATURAL SCIENCES Physics Condensed matter physics Semiconductor physics; NATURVETENSKAP Fysik Kondenserade materiens fysik Halvledarfysik;

    Abstract : Heteroepitaxial SiGe(C) layers have attracted immense attention as a material for performance boost in state of the art electronic devices during recent years. Alloying silicon with germanium and carbon add exclusive opportunities for strain and bandgap engineering. READ MORE