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Found 1 swedish dissertation matching the above criteria.

2. 1. Hollow Cathode Deposition of Thin Films

   Author : Lars-Erik Gustavsson; Ladislav Bárdoš; Hana Baránková; Claes Nender; Uppsala universitet; []
   Keywords : Electronics; Hollow cathode; Hybrid plasma; PVD; TiN films; Ferromagnetic substrates; Magnetized plasma; CrN films; Elektronik;

   Abstract : Thin films of metals and compounds have a very wide range of applications today. Many of the deposition methods used for the production of such films utilize plasma to support the growth the film, e.g. by the supply of energy and the enhancement of reactivity. READ MORE