Search for dissertations about: "Lina Sarro"

Found 1 swedish dissertation containing the words Lina Sarro.

2. 1. Heterogeneous material integration for MEMS

   Author : Fredrik Forsberg; Frank Niklaus; Lina Sarro; KTH; []
   Keywords : ;

   Abstract : This thesis describes heterogeneous integration methods for the fabrication of microelectromechanical systems (MEMS). Most MEMS devices reuse the fabrication techniques that are found in the microelectronics integrated circuit industry. This limits the selection of materials and processes that are feasible for the realization of MEMS devices. READ MORE