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Found 2 swedish dissertations matching the above criteria.

  1. 1. Growth and Characterization of ZrB2 Thin Films

    Author : Lina Tengdelius; Hans Högberg; Urban Forsberg; Denis Music; Linköpings universitet; []
    Keywords : Zirconium diboride ZrB2 ; Thin film; Magnetron sputtering; Epitaxi; Silicon carbide SiC ;

    Abstract : In this thesis, growth of ZrB2 thin films by direct current magnetron sputtering is investigatedusing a high vacuum industrial scale deposition system and an ultra-high vacuum laboratory scalesystem. The films were grown from ZrB2 compound targets at temperatures ranging from ambient (without external heating) to 900 °C and with substrate biases from -20 to -120 V. READ MORE

  2. 2. ZrB2 Thin Films : Growth and Characterization

    Author : Lina Tengdelius; Hans Högberg; Urban Forsberg; Gregory S. Girolami; Linköpings universitet; []
    Keywords : NATURVETENSKAP; NATURAL SCIENCES;

    Abstract : Zirconium diboride, ZrB2, is a ceramic material with bulk properties such as high melting point (3245 °C), high hardness (23 GPa), and low resistivity (~8 μΩcm). Thin film growth of ZrB2 using physical vapor deposition has suffered from problems with films deviating from stoichiometry and with high levels of contaminants, especially high oxygen content. READ MORE