Search for dissertations about: "Ling-guang Li"

Found 1 swedish dissertation containing the words Ling-guang Li.

2. 1. Fabrication and Characterization of Si-on-SiC Hybrid Substrates

   Author : Ling-Guang Li; Jörgen Olsson; Örjan Vallin; Stefan Bengtsson; Uppsala universitet; []
   Keywords : hydrophilic wafer bonding; silicon on silicon carbide; hybrid substrate; oxygen out-diffusion; Engineering Science with specialization in Electronics; Teknisk fysik med inriktning mot elektronik;

   Abstract : In this thesis, we are making a new approach to fabricate silicon on insulator (SOI). By replacing the buried silicon dioxide and the silicon handling wafer with silicon carbide through hydrophilic wafer bonding, we have achieved silicon on crystalline silicon carbide for the first time and silicon on polycrystalline silicon carbide substrates at 150 mm wafer size. READ MORE