Search for dissertations about: "Low energy Ion irradiation"
Showing result 1 - 5 of 18 swedish dissertations containing the words Low energy Ion irradiation.
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1. Toward Energy-efficient Physical Vapor Deposition : Routes for Replacing Substrate Heating during Magnetron Sputtering by Employing Metal Ion Irradiation
Abstract : In this Thesis, magnetron sputtering is perfected as an environmental-friendly deposition technique. I performed systematic studies of a novel approach - hybrid high-power impulse and dc magnetron co-sputtering (HiPIMS/DCMS) with metal-ion-synchronized substrate bias pulses. READ MORE
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2. Molecular Dynamics Studies of Low-Energy Atom Impact Phenomena on Metal Surfaces during Crystal Growth
Abstract : It is a well-known fact in the materials science community that the use of low-energy atom impacts during thin film deposition is an effective tool for altering the growth behavior and for increasing the crystallinity of the films. However, the manner in which the incident atoms affect the growth kinetics and surface morphology is quite complicated and still not fully understood. READ MORE
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3. Noise Aspects of some Si-based One Port Devices and Carbon Nanotubes
Abstract : The p-n junctions and Schottky diodes based on Si1-xGex and SiC are of great importance in modern electronic applications, such as microwave detectors and mixers. Carbon nanotubes (CNTs) have appeared recently as an attractive new class of materials with a reduced dimensionality, and proposed as building blocks for nanoelectronic technology. READ MORE
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4. Stability of point defects in silicon induced by high energy low dose ion implantation
Abstract : Ion implantation is a key' process for the introduction ofdopants in semiconductor technology. It involves bombarding thesubstrate material with energetic ions. READ MORE
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5. Effect of metal ion irradiation on hard coating synthesis by physical vapor deposition
Abstract : The aim of this thesis is to understand and control how the ions in the plasma influence the film growth during thin film deposition processes. Two physical vapor deposition (PVD) techniques are investigated, namely magnetron sputtering and cathodic arc evaporation. READ MORE