Search for dissertations about: "MEMS accelerometer"

Found 5 swedish dissertations containing the words MEMS accelerometer.

2. 1. Micromechanical three axis accelerometers : design, manufacture and general readout electronics

   Author : Henrik Rödjegård; Chalmers tekniska högskola; []
   Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; three axis accelerometer; MEMS accelerometer; sensor test bench; sensor system; bilk micromaching; accelerometer design;

   Abstract : .... READ MORE

4. 2. Integration of graphene into MEMS and NEMS for sensing applications

   Author : Xuge Fan; Frank Niklaus; Peter Steeneken; KTH; []
   Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Micro-electromechanical systems MEMS ; Nano-electromechanical systems NEMS ; heterogeneous 3D integration; Graphene; single-layer graphene; double-layer graphene; bilayer graphene; chemical vapor deposition CVD ; suspended graphene beams; suspended graphene membranes; doubly clamped; fully clamped; silicon on insulator SOI ; vapor hydrofluoric acid VHF ; Young’s modulus; built-in stress; built-in tension; piezoresistivity; gauge factor; accelerometer; resonators; electromechanical sensing; advanced transducers; humidity; gas sensing; sensitivity; CO2 sensing; graphene grain boundary; line defects; optical microscopy; wire bonding; Electrical Engineering; Elektro- och systemteknik;

   Abstract : This thesis presents a novel approach to integrate chemical vapor deposition (CVD) graphene into silicon micro- and nanoelectromechanical systems (MEMS/NEMS) to fabricate different graphene based MEMS/NEMS structures and explore mechanical properties of graphene as well as their applications such as acceleration sensing, humidity sensing and CO2 sensing. The thesis also presents a novel method of characterization of CVD graphene grain boundary based defects. READ MORE

5. 3. Micromachined Three-Axis Accelerometers and Sensor Readout Electronics

   Author : Henrik Rödjegård; Chalmers tekniska högskola; []
   Keywords : NATURVETENSKAP; NATURAL SCIENCES; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; three axis accelerometer; sensor readout; inertial sensors; gyroscope; MEMS; digital feedback; capacitive readout;

   Abstract : Miniaturized, MEMS-based, inertial navigation systems are used to track the position of moving objects without an external reference system. Several existing and future applications such as indoor navigation, stability control of vehicles, active prostheses or training aids for sportsmen would benefit from the small size and the low cost of micromachined inertial sensors. READ MORE

6. 4. Signal processing for MEMS sensor based motion analysis system

   Author : Jiaying Du; Maria Lindén; Nicholas Wickström; Mälardalens högskola; []
   Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Computer Science; datavetenskap;

   Abstract : Sensor systems for motion analysis represent an important class of embeddedsensor systems for health, and are usually based on MEMS technology(Micro-electro-mechanical systems). Gyroscopes and accelerometers are two examples of MEMS motion sensors that are characterized by their small size,low weight, low power consumption, and low cost. READ MORE

7. 5. Non-contact surface wave measurements on pavements

   Author : Henrik Bjurström; Nils Rydén; Björn Birgisson; Jinying Zhu; KTH; []
   Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; seismic testing; asphalt concrete; dynamic modulus; non-contact measurements; rolling measurements; surface waves; Lamb waves; MEMS microphones; Byggvetenskap; Civil and Architectural Engineering;

   Abstract : In this thesis, nondestructive surface wave measurements are presented for characterization of dynamic modulus and layer thickness on different pavements and cement concrete slabs. Air-coupled microphones enable rapid data acquisition without physical contact with the pavement surface. READ MORE