Search for dissertations about: "MEMS"

Showing result 11 - 15 of 84 swedish dissertations containing the word MEMS.

  2. 11. Heterogeneous material integration for MEMS

    Author : Fredrik Forsberg; Frank Niklaus; Lina Sarro; KTH; []
    Keywords : ;

    Abstract : This thesis describes heterogeneous integration methods for the fabrication of microelectromechanical systems (MEMS). Most MEMS devices reuse the fabrication techniques that are found in the microelectronics integrated circuit industry. This limits the selection of materials and processes that are feasible for the realization of MEMS devices. READ MORE

  4. 12. Micromachined Three-Axis Accelerometers and Sensor Readout Electronics

    Author : Henrik Rödjegård; Chalmers tekniska högskola; []
    Keywords : NATURVETENSKAP; NATURAL SCIENCES; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; three axis accelerometer; sensor readout; inertial sensors; gyroscope; MEMS; digital feedback; capacitive readout;

    Abstract : Miniaturized, MEMS-based, inertial navigation systems are used to track the position of moving objects without an external reference system. Several existing and future applications such as indoor navigation, stability control of vehicles, active prostheses or training aids for sportsmen would benefit from the small size and the low cost of micromachined inertial sensors. READ MORE

  5. 13. On-chip electrochemical capacitors and piezoelectric energy harvesters for self-powering sensor nodes

    Author : Agin Vyas; Chalmers tekniska högskola; []
    Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Energy storage; 2DOF; sensor node; Energy harvesting; piezoelectric energy harvesters; graphene oxide; spin coating; MEMS; Microsupercapacitors;

    Abstract : On-chip sensing and communications in the Internet of things platform have benefited from the miniaturization of faster and low power complementary-metal-oxide semiconductor (CMOS) microelectronics. Micro-electromechanical systems technology (MEMS) and development of novel nanomaterials have further improved the performance of sensors and transducers while also demonstrating reduction in size and power consumption. READ MORE

  6. 14. Wafer-scale Vacuum and Liquid Packaging Concepts for an Optical Thin-film Gas Sensor

    Author : Mikael Antelius; Göran Stemme; Yogesh B. Gianchandani; KTH; []
    Keywords : Microelectromechanical systems; MEMS; Nanoelectromechanical systems; NEMS; silicon; wafer-level; packaging; vacuum packaging; liquid encapsulation; integration; wire bonding; grating coupler; waveguide; Fabry-Perot resonator;

    Abstract : This thesis treats the development of packaging and integration methods for the cost-efficient encapsulation and packaging of microelectromechanical (MEMS) devices. The packaging of MEMS devices is often more costly than the device itself, partly because the packaging can be crucial for the performance of the device. READ MORE

  7. 15. Heterogeneous Integration of Shape Memory Alloysfor High-Performance Microvalves

    Author : Henrik Gradin; Göran Stemme; Peter Woias; KTH; []
    Keywords : Microelectromechanical systems; MEMS; silicon; wafer-level; integration; heterogeneous integration; wafer bonding; Au-Si; eutectic bonding; release etching; electrochemical etching; microvalves; microactuators; shape memory alloy; SMA; NiTinol; TiNi; NiTi; cold-state reset; bias spring; gate valves; wire bonding;

    Abstract : This thesis presents methods for fabricating MicroElectroMechanical System (MEMS) actuators and high-flow gas microvalves using wafer-level integration of Shape Memory Alloys (SMAs) in the form of wires and sheets. The work output per volume of SMA actuators exceeds that of other microactuation mechanisms, such as electrostatic, magnetic and piezoelectric actuation, by more than an order of magnitude, making SMA actuators highly promising for applications requiring high forces and large displacements. READ MORE