Search for dissertations about: "Mark Reed"

Found 1 swedish dissertation containing the words Mark Reed.

2. 1. Silicon Nanowires for Biomolecule Detection

   Author : Niklas Elfström; Jan Linnros; Mark Reed; KTH; []
   Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Material physics with surface physics; Materialfysik med ytfysik;

   Abstract : Starting from silicon on insulator (SOI) material, with a top silicon layer thickness of 100 nm, silicon nanowires were fabricated in a top down approach using electron beam (e-beam) lithography and subsequent eactive ion etching (RIE) and oxidation. Nanowires as narrow as 30 nm could be achieved. READ MORE