Search for dissertations about: "Muhammad Junaid GaN magnetron sputtering"

Found 2 swedish dissertations containing the words Muhammad Junaid GaN magnetron sputtering.

  1. 1. Magnetron Sputter Epitaxy of GaN

    University dissertation from Linköping : Linköping University Electronic Press

    Author : Muhammad Junaid; Linköpings universitet.; Linköpings universitet.; [2011]
    Keywords : NATURVETENSKAP; NATURAL SCIENCES; NATURAL SCIENCES; NATURVETENSKAP;

    Abstract : Electronic-grade GaN (0001) epilayers have been grown directly on Al2O3 (0001) substrates by reactive DC-magnetron sputter epitaxy (MSE) from a liquid Ga sputtering target in an Ar/N2 atmosphere. The as-grown GaN epitaxial film exhibit low threading dislocation density on the order of ≤ 1010 cm-2 obtained by transmission electron microscopy and modified Williamson-Hall plot. READ MORE

  2. 2. Magnetron Sputter Epitaxy of GaN Epilayers and Nanorods

    University dissertation from Linköping : Linköping University Electronic Press

    Author : Muhammad Junaid; Linköpings universitet.; Linköpings universitet.; [2012]
    Keywords : NATURVETENSKAP; NATURAL SCIENCES;

    Abstract : In this research, electronic-grade GaN(0001) epilayers and nanorods have been grown onto Al2O3(0001) and Si(111) substrates, respectively, by reactive magnetron sputter epitaxy (MSE) using liquid Ga as a sputtering target. MSE, employing ultra high vacuum conditions, high-purity source materials, and lowenergy ion assisted deposition from substrate biasing, is a scalable method, lending itself to large area GaN synthesis. READ MORE