Search for dissertations about: "NEMS sensors"

Found 3 swedish dissertations containing the words NEMS sensors.

  2. 1. Nanomechanical Phenomena in Low-Dimensional Structures

    Author : Anton Vikström; Chalmers tekniska högskola; []
    Keywords : NATURVETENSKAP; NATURAL SCIENCES; NATURVETENSKAP; NATURAL SCIENCES; superconductivity; acoustic sensors; heat flow; NEMS; surface acoustic waves; solitons; viscoelasticity; electronic edge states;

    Abstract : This is a compilation thesis which investigates various mechanical phenomena in different low-dimensional nanoscale systems. In the first part, we consider a purely mechanical phenomenon: the sensitivity of the dispersion of a Love-type surface acoustic wave (SAW) to geometry and material parameters. READ MORE

  4. 2. Integration and Fabrication Techniques for 3D Micro- and Nanodevices

    Author : Andreas C. Fischer; Frank Niklaus; Karl F. Böhringer; KTH; []
    Keywords : Microelectromechanical systems; MEMS; Nanoelectromechanical systems; NEMS; silicon; wafer-level; chip-level; through silicon via; TSV; packaging; 3D packaging; vacuum packaging; liquid encapsulation; integration; heterogeneous integration; wafer bonding; microactuators; shape memory alloy; SMA; wire bonding; magnetic assembly; self-assembly; 3D; 3D printing; focused ion beam; FIB;

    Abstract : The development of micro and nano-electromechanical systems (MEMS and NEMS) with entirely new or improved functionalities is typically based on novel or improved designs, materials and fabrication methods. However, today’s micro- and nano-fabrication is restrained by manufacturing paradigms that have been established by the integrated circuit (IC) industry over the past few decades. READ MORE

  5. 3. Nanoimprint Lithography Based Nanoelectromechanical Device Fabrication

    Author : Gang Luo; Fasta tillståndets fysik; []
    Keywords : NATURVETENSKAP; NATURAL SCIENCES;

    Abstract : This thesis presents studies concerning the development of nanoimprint lithography technology, nanoimprint lithography-based nanofabrication, as well as the production of NEMS devices and their characterization. It can be divided into the following parts: The first part introduces different NIL stamp fabricating methods and processes. READ MORE